The telecentric 151MP lenses of the Myutron BTL series (sold by Maxxvision) with integrated LED spot lighting enable the detection of the smallest errors and deviations. They were designed for area sensors with 151MP (3.76m/pixel), 127MP (3.45m/pixel) and 65MP as well as 16K line sensors (5m/pixel and 3.5m/pixel).
247MP CMOS by Sony
Sony recently released a 247MP rolling shutter CMOS image sensor available in monochrome (IMX811-AAMR) and color (IMX811-AAQR) variants which have a 64.84mm diagonal, a square pixel array, as well as 5.3fps.