
Precitec Optronics Flying Spot Scanner 310 combines OCT measurements with a large measuring field. The system uses a fast moving measuring point within its scanning area, so that ROI inspections are possible in ultra-short measuring cycles with high precision. This makes it ideal for measuring total thickness variation (TTV), deflection (bow and warp) and defects on a 12-inch wafer in one scan pass under 10 seconds and without additional axes.

















