Polytec’s high-resolution microscope-based white-light interferometer TopMap Micro.View+ provides color information (RGB) from the measured object in addition to height measurement, which simplifies defect assignment. Equipped with motorized x, y, and z axes, a 200x200x100mm travel range, and a motorized objective turret, inspection sequences can be automated according to predetermined procedures. The specimen height can be measured up to 370mm and the measuring head can be integrated separately directly into the production line. The 3D measurement data can be processed with any suitable evaluation software. This is particularly easy with the TMS software specially developed for the measuring system, which offers numerous options for evaluating the measurement results quickly and in compliance with ISO.
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