With HoloTop Motion, Fraunhofer IPM presents digital holographic sensors for high-precision 3D measurement of moving surfaces. Unlike conventional methods, components do not need to be stopped or removed from the production line for measurement. The sensor captures the surface strip by strip and assembles the measurement data into a continuous topographic map. The system is particularly well-suited for inspecting wafers, interposers, or ball grid arrays. Depending on the lens used, HoloTop Motion achieves a lateral resolution of better than 2µm, with an axial reproducibility of <1µm. Measurements can be performed at feed rates of up to 1m/s.
