High-Precision Inline Measurement of Thin Films

csm pr643 interferometer ims5200 th 336e0f32b5
Image: Micro-Epsilon Messtechnik GmbH & Co. KG

The white-light interferometers of the IMS5200-TH series from Micro-Epsilon are used for nanometer-precise film thickness measurements from 1 to 100µm with a linearity of <±100 nm. With a measurement rate of up to 24kHz, they are ideal for dynamic measurement tasks. Multi-peak measurements of up to five thin films are also possible. The sensor and controller are factory-aligned and calibrated, enabling nanometer-precise air gap and film thickness measurements.